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==Electron Cyclotron Resonance Plasma Device (ECR)== Characterizations of a 2.45 GHz/1.5 kW magnetron from a domestic microwave oven were done. Electron temperature (2-3.8 eV) and electron density (109 ?1010 cm-3) measurements of an argon microwave discharge indicate flexibility and plasma uniformity even at millitorr pressures by removing the hexapoles or varying their distances. The source makes a resonant surface with its repulsive double hexapole. magnetic configuration. Magnetic field maps and power delivery for varying hexapole distances are obtained. Group Leaders: *Dr. Roy B. Tumlos, PhD *Leo Mendel Rosario, PhD Physics student *Henry V. Lee, Jr., PhD Physics student *Julie Anne S. Ting , PhD Materials Science Engineering student
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