Editing National Institute of Physics (section)

====[[Plasma Physics Laboratory]]====

Program Coordinator: [[Henry J. Ramos]], Ph.D

The [[Plasma Physics Laboratory]] (PPL) has developed six plasma facilities and continues to experiment on ion sources (volume, surface, multicusp, gas discharge and microwave) for the production of hydrogen, helium, oxygen, other gas and metal ions and their use in the synthesis of high grade thin films of nitrides, oxides and carbides. A plasma-enhanced chemical vapor deposition (PECVD) facility is also developed for polymer modification as well as sterilization applications and dielectric barrier discharge for wood treatment. Other plasma chemistry applications are on the synthesis of hydrogenated silicon, hydrogenated diamond-like carbon, hetero-epitactic overlayers, carbon nanostructures, and silicon nanopillars. Studies are done as well on beam transport, diagnostics development (optical emission, Langmuir and ExB probes, electrostatic energy analyzers) and plasma dynamics particularly on enhancement of ion current density, ion energy, beam focusing and acceleration. These are done via simulation and compared to actual experimental results.